History of CMNST

Center for Micro/Nano Science and Technology (CMNST) established in 1997 is one of the three university-level research centers of National Cheng Kung University (NCKU). Subsidized by Taiwan National Science and Technology Program for Nanoscience and Nanotechnology and Research University Integration Project from the Ministry of Education, the center has accumulated abundant talents-cultivation experiences and top research achievements and thus become a key institute for nano technology and research in Taiwan.

Goals and Mission of CMNST

● Develop researches with novelty and industrial value

● Manage and operate open laboratories

● Support and develop cutting-edge academic researches

● Establish and enhance the functions of nanoMark Laboratory

● Stimulate the progress of regional education and research institutes

Facilities of CMNST

There are 71 facilities in CMNST gathered in the 500 m² Nanofabrication Clean Room (Class 1000) and the 380 m² Nano-Inspection Lab. All of the facilities are managed by professional engineers (MA degree) and researchers (PhD degree). The facilities are accessible in two ways—OEM and self-operation. Moreover, all of the facilities are under E-management, which provides 24 hour convenient-public-fair booking and charging service.

Develop Researches with Industrial Value

CMNST zealously participates in collaborations between the academic and the industry to become a novel linkage center for industry-academic research. Currently it collaborates with Industrial Technology Research Institute (ITRI), National Nano Device Laboratories (NDL), National Synchrotron Radiation Research Center (NSRRC), Tainan and Luchu Science Parks, National Center for High-Performance Computing (NCHC), China Steel Corp., Ulvac Taiwan, and ChipMOS Global. By the interaction among the industry, academic, and government, CMNST strengthens interdisciplinary cooperation to raise international awareness.

Research Teams of CMNST

According to the result of National Science Council performance evaluation of micro/nano centers in Taiwan, CMNST is a center with the largest scale, the greatest influence, and the best service and research KPIs. Every year CMNST provides service for 15 thousand person-time of facility operation and over 50 companies and issues more than 100 certified test reports. In addition, it has developed four in-house research teams: 1. Nanolithography, 2. Epitaxy & Nanosurface, 3. Nanomaterial Analysis, and 4. Nondestructive Analysis.

CMNST establishes the first Center for Graphene/2D Materials and Devices in Taiwan to develop the technology of large-area graphene/2D materials fabrication by synthesizing graphene quantum dots with great optical properties. Furthermore, with its technology of nano device fabrication, CMNST promotes the technology and applications of graphene/2D materials to boost the progress of industrial development in Taiwan.

● Nanolithography Team

Nanolithography Team focuses on the integration of photolithography, electron beam lithography, and dry/wet etching to develop a nano device fabrication platform. Currently several unique fabrication technologies, including 10 nm critical-dimension fabrication, high accuracy and multi-layer alignment (sub-20 nm) lithography, Mix & Match lithography, and super high aspect ratio (AR > 80) etching are established; besides, various applications, such as optical, electrical, and 3D-structured devices and imprinting templates, are developed.

●  Epitaxy & Nanosurface Team

Epitaxy & Nanosurface Team mainly works on the two-stage synthesizing to grow high-quality MoS₂ layers on 4-inch SiO₂/Si wafers. The MoS₂ layers are with good crystallinity and semiconductor properties verified by Raman spectra and Photo-Luminescence measurements.

●  Nanomaterial Analysis Team

Nanomaterial Analysis Team offers full service from material sample preparation to material analysis. The team has developed technology on professional sample preparation, image acquisition, and data analysis. The team also collaborates with other CMNST teams, and with the technology of liquid cell device for TEM, the team develops the analysis technology for particle dimensions, size distribution, shapes, composition, and agglomeration/aggregation.

●  Nondestructive Analysis Team

The self-established Multiphoton Excitation Microscopy System of Nondestructive Analysis Team is equipped with a femto-second laser whose wavelengths are from 680 nm to 1600 nm. For biomedical applications, signal waves of the system can be chosen according to different fluorescence dyes. Based on nonlinear optical property, the image scanning resolution of the system can be under 300 nm, and the impact of scattering is decreased thus favorable for observation of highly scattered samples. Additionally, it allows optical imaging of the edges and boundaries of the 2D materials. This technology provides a new approach for the research and application of 2D materials and components. The application of the system includes microscopic image of the cell interior, large-area rapid scan, non-invasive z-axis optical sectioning, pathology image analysis, collagen and elastin fibers scan by harmonic generation, nonlinear spectrum signal detection, and defect detection of luminescent materials.

NanoMark Laboratory of CMNST

In 2007, the nanotechnology product testing laboratory at CMNST registered as a nanoMark laboratory of Ministry of Economic Affairs (MOEA) and was certified by Taiwan Accreditation Foundation (TAF) to meet the ISO 17025 standards. The laboratory provides test service for nano-dimension measurements, nano-function, and biocompatibility. The laboratory accepts test applications from the industries to assist them in obtaining nanoMark from MOEA. Besides, the laboratory provides testing service for government procurement, manufactures’ quality control, and export trades.

Stimulate the Progress of Riginal Education and Research Institutes

CMNST provides advanced facilities and various nanotechnology-related courses for nearby education and research institutes, such as Tainan and Luchu Science Parks, Shalun Green Science City, universities, and high schools. Consequently, it has become the platform and hinge of nanotechnology development in southern Taiwan.