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About CMNST

Center for Micro/Nano Science and Technology (CMNST)


 

INTRODUCTION

Center for Micro/Nano Science and Technology (CMNST), established in 1997, is one of the university research centers of National Cheng Kung University (NCKU) to support the leading-edge researches in micro/nano scale. With its top-notch facilities, experienced engineers and researchers, CMNST in average provides more than 400 training courses, 15K academic services, and 100 industry test reports per year and directly supports the publication of 420 journal papers in the past five years thus becomes the key institute for micro/nano R&D in Taiwan. Currently, the application focus includes semiconductor, photoelectric, biomedical, and material science.

 

KEY MISSION

1. Equipment Support for Academic/Industry Research

2. Integration Platform for Industry-Academics Collaboration

3. Talent Incubation for Hand-on Engineer

4. Technology Development for Advanced Research

 

RESOURCES for ACADEMIC & INDUSTRY SERVICES

With its 900 square-meter space and near 80 top-notch facilities, CMNST provides its service through either OEM or self-operation modes, all under the E-management booking system. The OEM service can be custom-made with the discussion with the professional engineers (Master level) and the researchers (Ph.D. level) in CMNST. The self-operation service is available 24/7, provided that the operator is certified by the training courses. Moreover, through the services provided to both the academic and the industry, CMNST plays a platform role for Industry-Academics collaboration with the backup of top-ranked researches in NCKU.

 

TECHNOLOGY/SERVICE HIGHLIGHTS

From the technology aspect, the service of CMNST can be categorized into Fabrication and Inspection, each with its exclusive service and more importantly integrated to offer full-spectrum service for advanced researches.

Fabrication

The Fabrication Team emphases on the integration of photolithography, electron beam lithography and dry/wet etching to develop a nano-fabrication platform, including 10 nm fabrication, high accuracy and multi-layer alignment (sub-20 nm) lithography, mix & match lithography, as well as super-high aspect ratio (AR > 80) etching. With the Inductive Coupled Plasma Etching System (ICP) and the ICP RIE System (for metal and III-V compound materials), the SUSS mask aligner can achieve with stable high-resolution fabrication.

fig

For thin-film growth, CMNST is equipped with several metal and oxide thin-film deposition equipment to develop nano-coating techniques, such as high-quality MoS2 layers on 4-inch SiO2/Si wafers, verified by Raman spectra and photo-luminescence measurements. Recently Atomic Layer Deposition (ALD) service, with plasma and ozone system, is established to support solid, liquid, and gas precursors. These ALD systems are among the most advanced atomic layer epitaxial equipment in Taiwan.

fig2

Well patterned nano porous structure by ALD and E-beam lithography

 

Inspection

The Inspection Team offers professional service from sample preparation to analysis on chemical and physical properties. Besides Micro-Raman, AFM, various Spectrometers, and traditional EM, the Cryo-TEM service is integrated with the Instrument Center of NCKU as well as Dual Beam-Focused Ion Beam (FIB) for sample preparation. A startup company (Liquid View) is founded to promote the liquid EM technology developed in CMNST. With this EM technology, particle dimensions, size distribution, shapes, composition, and agglomeration/aggregation in the liquid phase can be observed inside SEM/TEM.

fig3

 

A Multiphoton Excitation Microscopy System, capable of 3D imaging, is also self-assembled in CMNST. The image scanning resolution can be under 200 nm with less scattering noise, which is particularly useful in bio-application. Additionally, it allows optical imaging of the edges and boundaries of 2D materials, which provides a unique approach for 2D materials study.

fig4

 

 

Integrated Service Platform for Fabrication and Inspection

By integrating the fabrication and inspection capabilities, engineers in CMNST can design and develop custom-made tools for various applications. The integration generally includes:

 Identifying spot-on facilities for specific application;

Evaluating parameters for fabrication process;

Inspecting and reviewing fabrication outcome;

 Consulting for special fabrication and inspection requirements

 

  • Research results
  • By using the Atomic Layer Deposition System (ALD), CMNST collaborates with BenQ Materials Corp. to develop Al2O3 thin films with high water resistance at low temperature. The films will be applied on biomedical materials. 

Grow Al2O3 thin films at 50°C by the Ozone System of ALD

  • Growing large area 2D transition metal dichalcogenide materials on patterned sapphire substrates with good sensing properties by the Chemical Vapor Deposition System of CMNST.
  • Electron beam inspection technology can provide better analyzing function than optical methods for liquid samples, however the incompatibilities of observing samples in liquid state in high vacuum environment restrict electron microscopy (EM) to be used only for solid state study. Moreover, liquid or wet samples cannot be inspected for the in-situ image survey and analyzation in their original states with EM. CMNST develops the “Development and Commercialization of Intelligent E-Beam Inspection System,” which contains many unique strengths: (1) In-situ e-beam analysis for liquid samples; (2) Multi-function sampling stage design; (3) High resolution liquid cell design; (4) Original liquid state analysis. The in-situ wet cell technique creates high resolution and high-quality images to identify the morphology and nano particle size distribution/composition. Furthermore, samples such as lotion and cream, can be observed in their actual status (without dilution).
  • A research of CMNST further confirms that one dimension in the 2D materials is confined; therefore, even at room temperature, it is easy to produce many-body physics effects and thus to form quasi-particles, such as exciton, trion, biexciton, etc. The intensity of the second-harmonic generation can be increased to three orders of magnitude under the exciton resonance energy. These many-body quasi-particles are the best platform for the development of nanophotonics. Multiphoton microscopy is an optimal equipment for visualizing the spatial distribution of many-body quasi-particles. This novel technique of using multiphoton microscopy shows the correlation between the spatial properties of exciton complexes and the excitation energy, which is crucial for understanding the interaction between excitons and charged carriers and 2D materials. The research result is published in 2019 Annual Meeting of the Physical Society of Taiwan and Graphene 2019 (“Revealing the Energy and Spatial Distribution of Edge States and Exciton Complexes in Transition Metal Dichalcogenides Using Multiphoton Microscopy”).
  • Dr. Kuang-I Lin of CMNST publishes the following papers by using the Multiphoton Excitation Microscopy, Micro-Raman & Micro-PL Spectrometer, Raman Spectrometer/Microscope, and UV/Visible/NIR Spectrophotometer.

『Fast real-space imaging of the exciton complexes in WSe2 and WS2 monolayers using multiphoton microscopy』, The Journal of Physical Chemistry C 124, 7979 (2020).   

  https://pubs.acs.org/doi/full/10.1021/acs.jpcc.9b11848

 『CVD Growth of Large-Area InS Atomic Layers and Device Applications』, Accepted by Nanoscale (2020).   

  https://pubs.rsc.org/en/Content/ArticleLanding/2020/NR/D0NR01104E#!divAbstract